Compound Semiconductors Lithium Tantalate Wafer used for Optical Devices, SAW Devices
Compound semiconductors are the semiconductors composed of more than two chemical elements. Lithium Tantalate(LiTaO3) wafer is used for several optical devices, especially surface acoustic wave(SAW) device. Because of the lithography in SAW device process, LiTaO3 polishing is needed. In this paper, the commercial slurries(NALCO2371^(TM), ILD1300^(TM), ceria slurry) used for chemical mechanical polishing(CMP) were tested, and the most suitable slurry was selected by measuring material removal rate and average centerline roughness(Ra).
| Diameter | Orientation | Thickness | Primary Flat | Material | Brand /Grade |
| 76.2±0.2mm | 36°Y Cut | 0.5±0.025mm | 22±2mm | LiTaO3 | SAW |
| 76.2±0.2mm | 36°Y Cut | 0.5±0.025mm | 22±2mm | Reduced LiTaO3 | SAW |
| 76.2±0.2mm | 42°Y Cut | 0.5±0.025mm | 22±2mm | LiTaO3 | SAW |
| 76.2±0.2mm | 42°Y Cut | 0.5±0.025mm | 22±2mm | Reduced LiTaO3 | SAW |
| 76.2±0.2mm | X-112°Y Cut | 0.5±0.025mm | 22±2mm | LiTaO3 | SAW |
| 76.2±0.2mm | X-112°Y Cut | 0.5±0.025mm | 22±2mm | Reduced LiTaO3 | SAW |
| 76.2±0.2mm | X Cut | 0.5±0.025mm | 22±2mm | LiTaO3 | Optical |
| 100±0.2mm | 36°Y Cut | 0.5±0.025mm | 32±2mm | LiTaO3 | SAW |
| 100±0.2mm | 36°Y Cut | 0.5±0.025mm | 32±2mm | Reduced LiTaO3 | SAW |
| 100±0.2mm | 42°Y Cut | 0.5±0.025mm | 32±2mm | LiTaO3 | SAW |
| 100±0.2mm | 42°Y Cut | 0.5±0.025mm | 32±2mm | Reduced LiTaO3 | SAW |
| 100±0.2mm | X-112°Y Cut | 0.5±0.025mm | 22±2mm | LiTaO3 | SAW |
| 100±0.2mm | X-112°Y Cut | 0.5±0.025mm | 22±2mm | Reduced LiTaO3 | SAW |
| 100±0.2mm | X Cut | 0.5±0.025mm | 22±2mm | LiTaO3 | Optical |
| Chemical formula | LiTaO3 |
| Molar mass | 235.887 g/mol |
| Density | 7.46 g/cm3, solid |
| Melting point | 1,650°C (3,000°F; 1,920K) |
| Solubility in water | Insoluble |
| Crystal structure | R3c |
| Lattice constant | a = 515.43 pm, c = 1378.35 pm |
FAQs:
- Q: What are the products you mainly work on?
A: We look at ourselves as the piezo wafer specialist. We are the very first to work with Single Crystal Quartz in China about 30 years ago. Then gradually we step in the field of LiNbO3, LiTaO3, Quartz glass, LGS, CTGS etc. Especially, if you are looking for a piezo quartz supplier, we are the ultimate choice! We export millions of quartz blanks each year because we master the AT, SC and IT cuts with superior angle precision.
- Q: Can you accept product customization?
A: Yes, of course. We can fabricate as per your request. In addition, we are so experienced with piezo wafers that we can provide you relevant suggestions if you are not 100% sure about your choice. Besides, we do have some standard wafers in stock, please check with us.
- Q: Can you deliver the goods via our courier agent?
A: Yes, we would suggest you go with the courier agent you are most familiar with (DHL, FedEX, UPS etc.). We can ship via your account. And, of course, we will pack the products safely in acceptable size to help you save the shipping cost. If you need us to take care of the freight, it’s also not a problem. We also have good discount with the international courier companies.
- Q: How can you guarantee we get what we want safely?
A: The wafer products are fragile and sometimes expensive. The last thing, as the manufacturer, we want to see is the products we make were damaged during courier. As a result, we will pack the wafers adequately and put them in a proper carton filled with buffer sponge. However, accidents are inevitable sometimes. So, please follow the “Acceptance check” steps shown in the drawings below. If the unwanted happened, we will either give the replenishment or refund if you follow the checking steps.
Acceptance Check
- The product is fragile. We have adequately packed it and labeled it fragile. We deliver through excellent domestic and international express companies to ensure transportation quality.
- After receiving the goods, please handle with care and check whether the outer carton is in good condition. Carefully open the outer carton and check whether the packing boxes are in alignment. Take a picture before you take them out.
- Please open the vacuum package in a clean room when the products are to be applied.
- If the products are found damaged during courier, please take a picture or record a video immediately. DO NOT take the damaged products out of the packaging box! Contact us immediately and we will solve the problem well.
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Lithium Tantalate Compound Semiconductor Wafer For Optical Devices SAW Devices Images
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